MEMS based Chemical Sensors for Biomedical Applications 25833
MEMS based Chemical Sensors for Biomedical Applications
Approved 1
In a chemical sensing system for biomedical applications, the system usually consist of a chemical sensing unit, microfluidic  and pumping system, microgenerator unit to power up the sensors, and an energy storage device. CuO and ZnO nanowires could be fabricated into a highly sensitive gas and chemical sensors for biomedical applications. Chemical sensing characteristics of CuO NWs and ZnO NWs with and without diode structure have been examined by measuring the resistance change towards 0.5% methanol vapour at room temperature. The diode based structures showed significant improvement in sensing behaviours. The implementation of CuO NWs and ZnO NWs with diode based structures showed great enhancement in terms of sensitivity, reliability and recovery rate. Elements to be detected are guided into microfluidic channels using MEMS micropumps. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography process. Conventional method by pouring PDMS on a silicon wafer and peeling after curing in soft lithography produces unspecific layer thickness. In the micropump, planar valveless design is used. The technique utilizes MEMS fabrication methods by using a double sided etch. A planar diffuser and a nozzle element of the pump, as well as a 150 μm thick silicon membrane, are designed and fabricated using only three pattern process steps. An actuator-chamber and a pump-chamber with depths of 250 μm are formed after 250 min KOH etching, while the diffuser/nozzle element with a depth of 50 μm is sequentially formed after chamber forming.

Prof. Dr. Burhanuddin Yeop Majlis
Institut of Microengineering and Nanoelectronics(IMEN)
Universiti Kebangsaan Malaysia

Prof Dato’ Dr. Burhanuddin Yeop Majlis is a professor of microelectronics at the Insitute of Microengineering and Nanoelectronics.  He received his Ph.D. in microelectronics from University of Durham, United Kingdom in 1988, MSc in microelectronics from University of Wales, UK in 1980, and BSc(Hons.) in Physics from UKM in 1979. He was a Deputy Dean of Engineering Faculty from 1995 until 1997. He is also a Research Fellow of Telekom Malaysia Research & Development Division, and he was the director of UKM-TM Microelectronics Research Centre at the Faculty of Engineering, UKM. He was responsible in developing and planning the setting up of the clean room for research  at UKM. He had attended intensive industrial training in GaAs MMIC design and manufacture at GEC-Marconi Material Technology Ltd. United Kingdom. He is the founder of the Institute of Microengineering and Nanoelectronics(IMEN) and the director of IMEN from 2002 until August 2018. He is a senior member of  the Institution of Electrical and Electronics Engineer (SMIEEE) and  the Chairman of IEEE Electron Devices Malaysia Chapter from 1994 to 2006. He also Fellow of Malaysian Solid State Science and Technology (FMSSS), Fellow of Institute of Enginering and Technology(FIET), Fellow Malaysia Academy of Sciences(FASc). He is the founder president of Malaysia Nantechnology Association(MNA). He initiated research in microfabrication and microsensors at UKM in 1995 and has also initiated research in GaAs technology with Telekom Malaysia. In 2001 he initiated research in MEMS with substantial research funding of US$10 million from Ministry of Science, Technology and Innovation. His current interest are design and fabrication of MEMS sensor, RFMEMS, BiOMEMS. Lab on Chip  and  microenergy and now is the program leader for MEMS research, a National Strategic Research Program. Now he is the lead scholar at Institute of Microengineering and Nanoelectronics(IMEN).

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Date & time
Tuesday 18 August 2020 3:30pm +08
End date & time
Tuesday 18 August 2020 4:30pm +08
Category Online event


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Date & time: 18/08/20 15:30:00 +08